[1] Tsinghua Univ, Inst Microelect, Beijing 100084, Peoples R China
[2] Tsinghua Univ, Tsinghua Natl Lab Informat Sci & Technol TNList, Beijing 100084, Peoples R China
[3] Tsinghua Univ, Dept Chem, Beijing 100084, Peoples R China
[4] Tsinghua Univ, CNMM, Beijing 100084, Peoples R China