Determination of Pb/(Zr plus Ti) and Zr/(Zr plus Ti) ratios of lead zirconate titanate surface by x-ray photoelectron spectroscopy

被引:6
作者
Sugiyama, O
Saito, S
Kato, K
Osumi, S
Kaneko, S
机构
[1] Shizuoaka Ind Res Inst, Shizuoka 4211221, Japan
[2] Fuji Ceram Co, Fujinomiya 4180111, Japan
[3] Shizuoka Univ, Dept Mat Sci & Technol, Hamamatsu, Shizuoka 4328561, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1999年 / 38卷 / 9B期
关键词
X-ray photoelectron spectroscopy; PZT; quantitative analysis; XPS intensity; calibration equation;
D O I
10.1143/JJAP.38.5461
中图分类号
O59 [应用物理学];
学科分类号
摘要
The quantitative analysis of the surface of lead zirconate titanate (PZT) ceramics, the compositions of which were in the ranges of 0.1 < Zr/(Zr + Ti) < 0.9 and 0.8 < Pb/(Zr + Ti) < 1.2, was conducted using X-ray photoelectron spectroscopy (XPS). The linear relationship between the corresponding XPS intensities and the atomic ratio Zr/(Zr + Ti) could be obtained as a calibration equation. Here, the newly derived proportionality factor was introduced for the cancellation of the systematic errors. The calibration equation for the atomic ratio Pb/(Zr + Ti) was also obtained in the same way. The 99.9% confidence intervals of the calibration equations for Zr/(Zr + Ti) and for Pb/(Zr + Ti) were all +/-2% and +/-3%, respectively, although they narrowed to +/-1% around the compositions of Zr/(Zr + Ti) = 0.5 and Pb/(Zr + Ti) = 1.0. This analytical method was successfully applied to the follow-up of the compositional change of the surface of the PZT ceramics through separate acid and heat treatments.
引用
收藏
页码:5461 / 5464
页数:4
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