Grating profile reconstruction based on finite elements and optimization techniques

被引：34
作者：
Elschner, J
Hsiao, GC
Rathsfeld, A
机构：
[1] Weierstr Inst Angew Anal & Stochast, D-10117 Berlin, Germany
[2] Univ Delaware, Dept Math Sci, Newark, DE 19716 USA
来源：
SIAM JOURNAL ON APPLIED MATHEMATICS | 2003年 / 64卷 / 02期
关键词：
difraction grating; profile reconstruction; optimization method; conjugate gradient algorithm;
D O I：
10.1137/S0036139902420018
中图分类号：
O29 [应用数学];
学科分类号：
070104 ;
摘要：
We consider the inverse diffraction problem to recover a two-dimensional periodic structure from scattered waves measured above and beneath the structure. The task is reformulated in the form of an optimization problem including special regularization terms. The solvability and the dependence on the parameter of regularization is analyzed. Numerical results for synthetic data demonstrate the practicability of the inversion algorithm.
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页码：525 / 545
页数：21
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