Calculation and analysis of surface acoustic wave properties of ZnO film on diamond under different excitation conditions

被引：6

作者：

Qian Li-Rong ^{[1
]}

Yang Bao-He ^{[1
,2
]}

机构：

[1] Tianjin Univ, Sch Precis Instrument & Optoelect Engn, Tianjin 300072, Peoples R China

[2] Tianjin Univ Technol, Tianjin Key Lab Film Elect & Commun Devices, Sch Elect Informat Engn, Tianjin 300384, Peoples R China

来源：

ACTA PHYSICA SINICA | 2013年 / 62卷 / 11期

基金：

国家高技术研究发展计划(863计划); 中国国家自然科学基金;

关键词：

surface acoustic wave; piezoelectric multilayered structure; effective permittivity; stiffness matrix method; GREENS-FUNCTIONS; PERMITTIVITY; FORMULATION;

D O I：

10.7498/aps.62.117701

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

In the last twenty years, the ZnO/diamond layered structure for surface acoustic wave (SAW) devices have been widely studied and have attracted great attention, due to its advantages of high acoustic velocity, high electromechanical coupling coefficient and high power durability. Distinguished from the conventional single-crystal substrate (such as quartz, lithium niobate), ZnO/diamond layered structure shows dispersive SAW properties, which can be excited by four ways: interdigital transducer (IDT)/ZnO/diamond, IDT/ZnO/shorting metal/diamond, ZnO/IDT/diamond, and shorting metal/ZnO/IDT/diamond. In this paper, the formulation based on the stiffness matrix method for calculating the effective permittivity of ZnO/diamond layered structure under four excitation conditions is given first. Then, by using this formulation, the SAW properties of the monocrystalline ZnO (002) film on polycrystalline diamond and the polycrystalline ZnO (002) film on polycrystalline diamond are calculated respectively. Based on the results of calculation, the ZnO film thicknesses qualified to design and fabricate SAW device are analyzed in detail. Finally, we discuss the function of diamond film thickness of ZnO/diamond/Si layered structure so as to avoid the influence of the silicon substrate on the SAW properties.

引用

页数：12

共 35 条

[1]

Adler EL, 1995, ULTRASON, P341, DOI 10.1109/ULTSYM.1995.495594

[2] MATRIX-METHODS APPLIED TO ACOUSTIC-WAVES IN MULTILAYERS [J].

ADLER, EL .

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 1990, 37 (06) :485-490

[3] Growth of AlN piezoelectric film on diamond for high-frequency surface acoustic wave devices [J].

Benetti, M ;

Cannatà, D ;

Di Pietrantonio, F ;

Verona, E .

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2005, 52 (10) :1806-1811

[4] A METHOD FOR ESTIMATING OPTIMAL CRYSTAL CUTS AND PROPAGATION DIRECTIONS FOR EXCITATION OF PIEZOELECTRIC SURFACE WAVES [J].

CAMPBELL, JJ ;

JONES, WR .

IEEE TRANSACTIONS ON SONICS AND ULTRASONICS, 1968, SU15 (04) :209-+

[5]

Carlotti G., 1987, IEEE 1987 Ultrasonics Symposium Proceedings (Cat. No.87CH2492-7), P295

[6] Study on electromechanical coupling coefficients of surface acoustic waves in layered systems [J].

Chen, YY ;

Hsu, JC ;

Wu, TT .

JOURNAL OF THE CHINESE INSTITUTE OF ENGINEERS, 2004, 27 (06) :823-832

[7]

Fu Y, 2012, BIOMICROFUIDICS, V6

[8]

Fujii S, 1997, P IEEE 1997 ULTR S, V1, P183

[9]

Guang Y, 2007, ACTA PHYS SINICA, V56, P3515

[10] SAW device modeling including velocity dispersion based on ZnO/Diamond/Si layered structures [J].

Hachigo, A ;

Malocha, DC .

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 1998, 45 (03) :660-666

← 1 2 3 4 →