Aluminum doped zinc oxide sputtering targets obtained from nanostructured powders: Processing and application

被引：50
作者：
Neves, Nuno [1 ,2 ,3 ]
Barros, Raquel [1 ,2 ,3 ]
Antunes, Elsa [1 ]
Calado, Joao [1 ]
Fortunato, Elvira [2 ,3 ]
Martins, Rodrigo [2 ,3 ]
Ferreira, Isabel [2 ,3 ]
机构：
[1] Mat Avancados SA, INNOVNANO, P-3040570 Antanhol, Portugal
[2] Univ Nova Lisboa, Fac Ciencias & Tecnol, Dept Ciencia Mat, CENIMAT 13N, P-2829516 Caparica, Portugal
[3] CEMOP UNINOVA, P-2829516 Caparica, Portugal
来源：
JOURNAL OF THE EUROPEAN CERAMIC SOCIETY | 2012年 / 32卷 / 16期
关键词：
Aluminum doped zinc oxide (AZO); Electrical conductivity; Sintering; Final microstructure; Films; THIN-FILMS; GRAIN-GROWTH; TRANSPARENT; AL; NANOCRYSTALLINE; DENSIFICATION; TEMPERATURE;
D O I：
10.1016/j.jeurceramsoc.2012.08.007
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
This work reports the production of ceramic targets based on nanostructured Al-doped ZnO (AZO) powders for sputtering applications. The nanostructured powder is obtained by a new patented process based on the detonation of an emulsion containing both Zn and Al metal precursors in the final proportion of 98:2 wt% (ZnO:Al2O3), through which the Al contains is highly uniform distributed over ZnO. Due to the nanostructured powder characteristics, the targets can be sintered at substantially lower temperatures (1150-1250 degrees C) by conventional sintering, contributing to production costs reduction of ceramic targets and consequently the costs of photovoltaic and displays industries. Electrical resistivity values around 3.0-7.0 x 10(-3) Omega cm have been obtained depending on final microstructure of the targets. The electro-optical properties of the films produced at room temperature with thicknesses around 360 nm, besides being highly uniform exhibit a resistivity of about 1 x 10(-3) Omega cm and a transmittance in the visible range above 90%. (C) 2012 Elsevier Ltd. All rights reserved.
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页码：4381 / 4391
页数：11
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