Effect of proton irradiation on AlGaN/GaN micro-Hall sensors

被引:11
作者
Abderrahmane, A. [1 ]
Koide, S. [1 ]
Okada, H. [1 ,2 ]
Takahashi, H. [1 ]
Sato, S. [3 ]
Ohshima, T. [3 ]
Sandhu, A. [1 ,2 ]
机构
[1] Toyohashi Univ Technol, Dept Elect & Elect Informat Engn, Toyohashi, Aichi 4418580, Japan
[2] Toyohashi Univ Technol, Elect Inspired Interdisciplinary Res Inst EIIRIS, Toyohashi, Aichi 4418580, Japan
[3] Japan Atom Energy Agcy, Quantum Beam Sci Directorate, Takasaki, Gunma 3701292, Japan
关键词
RAMAN; MOBILITY; GAN;
D O I
10.1063/1.4805357
中图分类号
O59 [应用物理学];
学科分类号
摘要
The magnetoelectric properties of AlGaN/GaN micro-Hall effect sensors were studied after 380 keV proton irradiation. After irradiation the current-voltage measurements, stability of the magnetic sensitivity of the sensors, and the sheet electron density were degraded with a dramatic decrease of the electron mobility at high temperatures. Raman spectroscopy showed a degradation in the crystalline quality of GaN crystal, but there was no change in the strain. (C) 2013 AIP Publishing LLC.
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页数:4
相关论文
共 24 条
[11]   High temperature Hall effect sensors based on AlGaN/GaN heterojunctions [J].
Lu, H ;
Sandvik, P ;
Vertiatchikh, A ;
Tucker, J ;
Elasser, A .
JOURNAL OF APPLIED PHYSICS, 2006, 99 (11)
[12]   Study of proton irradiation effects on AlGaN/GaN high electron mobility transistors [J].
Lv, Ling ;
Ma, J. G. ;
Cao, Y. R. ;
Zhang, J. C. ;
Zhang, W. ;
Li, L. ;
Xu, S. R. ;
Ma, X. H. ;
Ren, X. T. ;
Hao, Y. .
MICROELECTRONICS RELIABILITY, 2011, 51 (12) :2168-2172
[13]   High-temperature electron transport properties in AlGaN/GaN heterostructures [J].
Maeda, N ;
Tsubaki, K ;
Saitoh, T ;
Kobayashi, N .
APPLIED PHYSICS LETTERS, 2001, 79 (11) :1634-1636
[14]   Effects of Proton Irradiation on the Magnetoelectric Properties of 2DEG AlGaN/GaN Micro-Hall Sensors [J].
Okada, H. ;
Abderrahmane, A. ;
Koide, S. ;
Takahashi, H. ;
Sato, S. ;
Ohshima, T. ;
Sandhu, A. .
ASIA-PACIFIC INTERDISCIPLINARY RESEARCH CONFERENCE 2011 (AP-IRC 2011), 2012, 352
[15]  
Pearton S., 2012, SPRINGER SERIES MAT, P252
[16]   Neutron irradiation effects in AlGaN/GaN heterojunctions [J].
Polyakov, AY ;
Smirnov, NB ;
Govorkov, AV ;
Markov, AV ;
Pearton, SJ ;
Kolin, NG ;
Merkurisov, DI ;
Boiko, VM ;
Skowronski, M ;
Lee, IH .
PHYSICA B-CONDENSED MATTER, 2006, 376 :523-526
[17]   Mobility of electrons in bulk GaN and AlxGa1-xN/GaN heterostructures [J].
Ridley, BK ;
Foutz, BE ;
Eastman, LF .
PHYSICAL REVIEW B, 2000, 61 (24) :16862-16869
[18]   Nano and micro Hall-effect sensors for room-temperature scanning hall probe microscopy [J].
Sandhu, A ;
Okamoto, A ;
Shibasaki, I ;
Oral, A .
MICROELECTRONIC ENGINEERING, 2004, 73-4 :524-528
[19]   High efficiency Hall effect micro-biosensor platform for detection of magnetically labeled biomolecules [J].
Sandhu, Adarsh ;
Kumagai, Yoshimichi ;
Lapicki, Adam ;
Sakamoto, Satoshi ;
Abe, Masanori ;
Handa, Hiroshi .
BIOSENSORS & BIOELECTRONICS, 2007, 22 (9-10) :2115-2120
[20]   2 MeV ion irradiation effects on AlGaN/GaN HFET devices [J].
Sonia, G. ;
Richtera, E. ;
Brunner, F. ;
Denker, A. ;
Lossy, R. ;
Mai, M. ;
Lenk, F. ;
Bundesmann, J. ;
Pensl, G. ;
Schmidt, J. ;
Zeimer, U. ;
Wang, L. ;
Baskar, K. ;
Weyers, M. ;
Wuerfl, J. ;
Traenkle, G. .
SOLID-STATE ELECTRONICS, 2008, 52 (07) :1011-1017