Tribological properties of diamond-like nanocomposite coatings at high temperatures

被引:47
作者
Venkatraman, C [1 ]
Brodbeck, C [1 ]
Lei, R [1 ]
机构
[1] Adv Refractory Technol, Buffalo, NY 14207 USA
关键词
diamond-like nanocomposites; DLN; high temperatures; doped diamond-like carbon; tribological properties;
D O I
10.1016/S0257-8972(99)00241-8
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Diamond-like nanocomposites (DLN) films are amorphous and consist of C, H, Si, and O. In addition, metal atoms can be incorporated into the coatings. The DLN coatings exhibit a low coefficient of friction, low wear rate, low stress, high hardness and good adhesion on a variety of substrates. The thermal stability of DLN films deposited on silicon substrates was investigated after the samples had been thermally annealed in air and argon atmospheres. The sample analysis by micro-Raman spectroscopy, nano-indentation and ball-on-disk tribometry are reported here. The investigation revealed that the performance of DLN films from a tribological perspective is very good up to 400 degrees C in air. The hardness of the DLN films showed a decrease of less than 15% up to 400 degrees C in air. The wear rate of the DLN films was at or below 10(-7) mm(3)/Nm up to 400 degrees C in air. (C) 1999 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:215 / 221
页数:7
相关论文
共 20 条
  • [1] LIGHT-INDUCED VARIATIONS OF OPTICAL-PROPERTIES OF DIAMOND-LIKE FILMS
    AGEEV, VP
    CHAPLIEV, NI
    GLUSHKO, TN
    KONONENKO, TV
    KUZMICHOV, AV
    SMOLIN, AA
    STRELNITSKY, VE
    DORFMAN, VF
    PYPKIN, BN
    [J]. SURFACE & COATINGS TECHNOLOGY, 1991, 47 (1-3) : 269 - 278
  • [2] The effect of hydrogen evolution on the mechanical properties of hydrogenated amorphous carbon
    Benlahsen, M
    Branger, V
    Henocque, J
    Badawi, F
    Zellama, K
    [J]. DIAMOND AND RELATED MATERIALS, 1998, 7 (06) : 769 - 773
  • [3] Dalton A, 1997, MATER RES SOC SYMP P, V446, P407
  • [4] Dekempeneer E, 1997, DIAMOND FILM TECHNOL, V7, P181
  • [5] Nitrogen doped fluorinated amorphous carbon thin films grown by plasma enhanced chemical vapor deposition for low dielectric constant interlayer dielectrics
    Endo, K
    Tatsumi, T
    [J]. APPLIED PHYSICS LETTERS, 1996, 68 (25) : 3656 - 3658
  • [6] FOUNTZOULAS CG, 1995, APPL DIAMOND FILMS R, P907
  • [7] GANGOPADHYAY A, 1995, APPL DIAMOND FILMS R, P691
  • [8] OPTICAL AND TRIBOLOGICAL PROPERTIES OF HEAT-TREATED DIAMOND-LIKE CARBON
    GRILL, A
    PATEL, V
    MEYERSON, BS
    [J]. JOURNAL OF MATERIALS RESEARCH, 1990, 5 (11) : 2531 - 2537
  • [9] Tribology of diamondlike carbon and related materials: an updated review
    Grill, A
    [J]. SURFACE & COATINGS TECHNOLOGY, 1997, 94-5 (1-3) : 507 - 513
  • [10] An investigation of the properties of Ti-C:H Films
    LoBiondo, NE
    Aharonov, RR
    Fontana, RP
    [J]. SURFACE & COATINGS TECHNOLOGY, 1997, 94-5 (1-3) : 652 - 657