Single standing carbon nanotube array in gate holes using a silicon nitride cap layer

被引：15
作者：
Lim, SH
Yoon, HS
Moon, JH
Park, KC
Jang, J [1 ]
机构：
[1] Kyung Hee Univ, Dept Informat Display, Seoul 130701, South Korea
[2] Kyung Hee Univ, Adv Display Res Ctr, Seoul 130701, South Korea
来源：
APPLIED PHYSICS LETTERS | 2005年 / 87卷 / 24期
关键词：
D O I：
10.1063/1.2142079
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We studied the growth of a single standing carbon nanotube (CNT) which was grown by plasma-enhanced chemical vapor deposition in the gate hole formed by conventional photolithography in the silicon nitride. The number of CNT per hole increases with increasing the gate hole diameter and a single CNT could be grown in a 3 mu m hole. A single standing CNT in a gate hole exhibited the turn-on field of 1.6 V/mu m and the current density of 16 mu A at 3.3 V/mu m. The emission currents follow the Fowler-Nordheim equation with a field enhancement factor of 1.14x10(7).
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页码：1 / 3
页数：3
相关论文
共 14 条
[1]   Characterization of the field emission properties of individual thin carbon nanotubes [J].
de Jonge, N ;
Allioux, M ;
Doytcheva, M ;
Kaiser, M ;
Teo, KBK ;
Lacerda, RG ;
Milne, WI .
APPLIED PHYSICS LETTERS, 2004, 85 (09) :1607-1609
[2]   Electron emission in intense electric fields [J].
Fowler, RH ;
Nordheim, L .
PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-CONTAINING PAPERS OF A MATHEMATICAL AND PHYSICAL CHARACTER, 1928, 119 (781) :173-181
[3]  
GOMER R, 1961, FIELD EMISSION FIELD, pCH1
[4]   Field emission properties of carbon nanotubes [J].
Gröning, O ;
Küttel, OM ;
Emmenegger, C ;
Gröning, P ;
Schlapbach, L .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2000, 18 (02) :665-678
[5]   Vertically aligned carbon nanofiber-based field emission electron sources with an integrated focusing electrode [J].
Guillorn, MA ;
Yang, X ;
Melechko, AV ;
Hensley, DK ;
Hale, MD ;
Merkulov, VI ;
Simpson, ML ;
Baylor, LR ;
Gardner, WL ;
Lowndes, DH .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2004, 22 (01) :35-39
[6]  
LIM SH, 2004, SID 04, P924
[7]  
LIM SH, 2004, IDW 04, P1205
[8]   Electron emission from arrays of carbon nano tubes/fibres [J].
Milne, WI ;
Teo, KBK ;
Chhowalla, M ;
Arnaratunga, GAJ ;
Pribat, D ;
Legagneux, P ;
Pirio, G ;
Binh, VT ;
Semet, V .
CURRENT APPLIED PHYSICS, 2002, 2 (06) :509-513
[9]  
Park KC, 2004, J KOREAN PHYS SOC, V45, pS833
[10]   Fabrication and electrical characteristics of carbon nanotube field emission microcathodes with an integrated gate electrode [J].
Pirio, G ;
Legagneux, P ;
Pribat, D ;
Teo, KBK ;
Chhowalla, M ;
Amaratunga, GAJ ;
Milne, WI .
NANOTECHNOLOGY, 2002, 13 (01) :1-4
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