Microstructure and optical properties of Ag/ITO/Ag multilayer films

被引：3
|
作者：
Sun, Zhaoqi [1 ]
Zhang, Maocui [1 ]
Xia, Qiping [1 ]
He, Gang [1 ]
Song, Xueping [1 ]
机构：
[1] Anhui Univ, Sch Phys & Mat Sci, Hefei 230601, Peoples R China
来源：
NANOSCALE RESEARCH LETTERS | 2013年 / 8卷
基金：
中国国家自然科学基金;
关键词：
Ag/ITO/Ag multilayer films; Microstructure; Optical properties; INDIUM TIN OXIDE; ITO THIN-FILMS;
D O I：
10.1186/1556-276X-8-424
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Transflective and highly conductive Ag/ITO/Ag multilayer films were prepared by magnetron sputtering on glass substrates. The microstructure and optical properties of Ag/ITO/Ag multilayer films were systematically investigated by X-ray diffraction, scanning electron microscopy, and ultraviolet-visible spectroscopy. The optical properties of the multilayer films were significantly influenced by the thickness of the Ag surface layer from 3.0 to 12.6 nm. The multilayer film of Ag9.3nm/ITO142nm/Ag9.3nm shows the best comprehensive property. It could satisfy the requirement for transflective LCD.
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页码：1 / 5
页数：5
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