Multi-channel DFB laser arrays fabricated by SAG technology

被引：16
|
作者：
Zhang, Can [1 ]
Liang, Song [1 ]
Zhu, Hongliang [1 ]
Ma, Li [1 ]
Wang, Baojun [1 ]
Ji, Chen [1 ]
Wang, Wei [1 ]
机构：
[1] Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
来源：
OPTICS COMMUNICATIONS | 2013年 / 300卷
基金：
中国国家自然科学基金;
关键词：
Selective area growth; Distributed feedback lasers; Multi-channel laser array; SELECTIVE-AREA GROWTH; ELECTROABSORPTION-MODULATED LASERS; MULTIPLE-QUANTUM-WELL; VAPOR-PHASE EPITAXY; WAVE-GUIDE; MOVPE; PHOTOLUMINESCENCE;
D O I：
10.1016/j.optcom.2013.03.012
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Selective area growth (SAG) of multi-quantum well materials (MQW) has been carried out for the fabrication of monolithically integrated DFB laser arrays. The effects of different growth conditions on the control of MQW emission wavelengths are studied in view of achieving uniformly spaced array wavelengths. It is found that SAG of MQWs at a lower reactor pressure and with a wider opening of the SAG masks shows better control of both the optical properties of the MQW materials and the emission wavelengths of lasers. Through optimizing the SAG conditions, a rather good control of the emission wavelengths of DFB lasers is obtained, with less than 0.1 nm wavelength deviations from its corresponding fitted value. (C) 2013 Elsevier B.V. All rights reserved.
引用
收藏
页码：230 / 235
页数：6
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