Formation mechanism of femtosecond laser-induced high spatial frequency ripples on semiconductors at low fluence and high repetition rate

被引:31
|
作者
Le Harzic, R. [1 ]
Stracke, F. [1 ]
Zimmermann, H. [1 ]
机构
[1] Fraunhofer Inst Biomed Engn IBMT, D-66386 St Ingbert, Germany
基金
美国国家科学基金会;
关键词
SINGLE-CRYSTAL; SILICON; SURFACE; ABLATION; DAMAGE; TRANSITIONS; PULSES;
D O I
10.1063/1.4803895
中图分类号
O59 [应用物理学];
学科分类号
摘要
Periodic high spatial frequency ripples structures (HSFL) have been generated in silicon (Si) and in germanium (Ge) at very low fluence below or close to the melting fluence threshold, at different wavelengths and at high repetition rate femtosecond laser pulses (80 MHz, 700-950 nm, 170 fs). HSFL initiation, formation, and arrangement combine structural modification of the surface initiated by heat accumulation of successive pulses with second harmonic generation. HSFL are wavelength dependent and the refractive index plays a central role on their periodicities. HSFL spacing follows quite well a law of Lambda=lambda/2n(lambda)*, where n(lambda)* is the modified femtosecond laser excited refractive index as a function of the wavelength for Si and Ge. (C) 2013 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution 3.0 Unported License.
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页数:5
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