Improved linearity in AlGaN/GaN metal-insulator-semiconductor high electron mobility transistors with nonlinear polarization dielectric

被引:21
作者
Gao, Tao [1 ,2 ]
Xu, Ruimin [1 ]
Kong, Yuechan [2 ]
Zhou, Jianjun [2 ]
Kong, Cen [2 ]
Dong, Xun [2 ]
Chen, Tangsheng [2 ]
机构
[1] Univ Elect Sci & Technol China, Fundamental Sci EHF Lab, Chengdu 611731, Peoples R China
[2] Nanjing Elect Devices Inst, Sci & Technol Monolith Integrated Circuits & Modu, Nanjing 210016, Jiangsu, Peoples R China
基金
中国国家自然科学基金;
关键词
HETEROSTRUCTURE; AMPLIFIER; HEMTS; FILMS;
D O I
10.1063/1.4922724
中图分类号
O59 [应用物理学];
学科分类号
摘要
We demonstrate highly improved linearity in a nonlinear ferroelectric of Pb(Zr0.52Ti0.48)-gated AlGaN/GaN metal-insulator-semiconductor high electron mobility transistor (MIS-HEMT). Distinct double-hump feature in the transconductance-gate voltage (g(m)-V-g) curve is observed, yielding remarkable enhancement in gate voltage swing as compared to MIS-HEMT with conventional linear gate dielectric. By incorporating the ferroelectric polarization into a self-consistent calculation, it is disclosed that in addition to the common hump corresponding to the onset of electron accumulation, the second hump at high current level is originated from the nonlinear polar nature of ferroelectric, which enhances the gate capacitance by increasing equivalent dielectric constant nonlinearly. This work paves a way for design of high linearity GaN MIS-HEMT by exploiting the nonlinear properties of dielectric. (C) 2015 AIP Publishing LLC.
引用
收藏
页数:3
相关论文
共 17 条
[1]   Interfacial nanochemistry and electrical properties of Pb(Zr0.3Ti0.7)O3 films on GaN/sapphire [J].
Cao, W ;
Bhaskar, S ;
Li, J ;
Dey, SK .
THIN SOLID FILMS, 2005, 484 (1-2) :154-159
[2]   Comparative studies of AlGaN/GaN MOS-HEMTs with stacked gate dielectrics by the mixed thin film growth method [J].
Chou, Bo-Yi ;
Hsu, Wei-Chou ;
Lee, Ching-Sung ;
Liu, Han-Yin ;
Ho, Chiu-Sheng .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2013, 28 (07)
[3]   Dynamic gate bias technique for improved linearity of GaNHFET power amplifiers [J].
Conway, AM ;
Yu, Z ;
Asbeck, PM ;
Micovic, M ;
Moon, J .
2005 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM, VOLS 1-4, 2005, :499-502
[4]   Effect of Optical Phonon Scattering on the Performance of GaN Transistors [J].
Fang, Tian ;
Wang, Ronghua ;
Xing, Huili ;
Rajan, Siddharth ;
Jena, Debdeep .
IEEE ELECTRON DEVICE LETTERS, 2012, 33 (05) :709-711
[5]   AlGaN/GaN Metal-Oxide-Semiconductor High-Electron Mobility Transistor With Liquid-Phase-Deposited Barium-Doped TiO2 as a Gate Dielectric [J].
Hu, Chih-Chun ;
Lin, Mon-Sen ;
Wu, Tsu-Yi ;
Adriyanto, Feri ;
Sze, Po-Wen ;
Wu, Chang-Luen ;
Wang, Yeong-Her .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2012, 59 (01) :121-127
[6]   A 6 to 16 GHz linearized GaN power amplifier [J].
Katz, Allen ;
Kubak, Michael ;
DeSalvo, Gregory .
2006 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST, VOLS 1-5, 2006, :1364-+
[7]   Improving the Linearity of GaN HEMTs by Optimizing Epitaxial Structure [J].
Khalil, Ibrahim ;
Bahat-Treidel, Eldad ;
Schnieder, Frank ;
Wuerfl, Joachim .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2009, 56 (03) :361-364
[8]   AlGaN/GaN metal-oxide-semiconductor heterostructure field-effect transistors on SiC substrates [J].
Khan, MA ;
Hu, X ;
Tarakji, A ;
Simin, G ;
Yang, J ;
Gaska, R ;
Shur, MS .
APPLIED PHYSICS LETTERS, 2000, 77 (09) :1339-1341
[9]   Ferroelectric polarization-controlled two-dimensional electron gas in ferroelectric/AlGaN/GaN heterostructure [J].
Kong, Y. C. ;
Xue, F. S. ;
Zhou, J. J. ;
Li, L. ;
Chen, C. ;
Li, Y. R. .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2009, 95 (03) :703-706
[10]   Enhanced AlGaN/GaN MOS-HEMT Performance by Using Hydrogen Peroxide Oxidation Technique [J].
Liu, Han-Yin ;
Chou, Bo-Yi ;
Hsu, Wei-Chou ;
Lee, Ching-Sung ;
Sheu, Jinn-Kong ;
Ho, Chiu-Sheng .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2013, 60 (01) :213-220