Design and fabrication of a novel flowmeter with corrugated structure

被引：5

作者：

Choi, Dae Keun ^{[1
]}

Lee, Sang Hoon ^{[1
,2
]}

机构：

[1] Seoul Natl Univ Sci & Technol, Grad Sch NID Fus Technol, Seoul, South Korea

[2] Seoul Natl Univ Sci & Technol, Dept Automot Engn, Seoul, South Korea

来源：

MICROELECTRONIC ENGINEERING | 2012年 / 98卷

关键词：

Flowmeter; Corrugation structure; MEMS; Piezoresistive detection; FLOW SENSOR; DIAPHRAGMS; DIRECTION;

D O I：

10.1016/j.mee.2012.07.093

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We designed, fabricated and evaluate the novel air flowmeter with corrugation structure for the detection of low air velocity. For measuring the low air flow rate, the sensitivity related factors, the air drag force and the output signal, should be improved at the given airflow, The device has the paddle structure, and the maximized air drag force is obtained with vertical air flow. The output signal is also improved with the corrugation structure and measured with piezoresistive detection. The low air flow rate with less than 1 m/s air velocity are applied, and the fabricated flowmeter with corrugation structure shows the better sensitivity and the response time than those of flat one. Various experiments about repeated measurements also show the stabilized signals. (C) 2012 Elsevier B.V. All rights reserved.

引用

页码：477 / 482

页数：6

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