Observation of second harmonic currents in inductively coupled plasmas

被引：34

作者：

Godyak, VA ^{[1
]}

Piejak, RB ^{[1
]}

Alexandrovich, BM ^{[1
]}

机构：

[1] OSRAM SYLVANIA Dev Inc, Beverly, MA 01915 USA

来源：

PHYSICAL REVIEW LETTERS | 1999年 / 83卷 / 08期

关键词：

D O I：

10.1103/PhysRevLett.83.1610

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

Second harmonic currents circulating around the main discharge current of fundamental frequency have been found in a low-pressure cylindrical inductive discharge with a planar inductor coil. These currents exist over a wide range of discharge conditions and are more pronounced at lower frequency and lower gas pressure. The observed second harmonic currents presumably are driven by the rf Lorentz force produced by the electron oscillatory velocity and the rf magnetic field.

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页码：1610 / 1612

页数：3

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