[1] Iowa State Univ, Dept Elect & Comp Engn, Ames, IA 50011 USA
[2] Univ Calif Los Angeles, Dept Elect Engn, Los Angeles, CA 90095 USA
[3] Zhejiang Univ, State Key Lab Silicon Mat, Hangzhou 310027, Peoples R China
[4] Zhejiang Univ, Dept Mat Sci & Engn, Ctr Electron Microscopy, Hangzhou 310027, Peoples R China
[5] Univ Calif Berkeley, Lawrence Berkeley Natl Lab, Adv Light Source Div, Berkeley, CA 94720 USA
[6] Univ Queensland, Ctr Microcopy & Microanal, Brisbane, Qld 4072, Australia