Evaluation of the instrument for three-dimensional atom probe (3DAP)

被引：6

作者：

Kaneko, T. ^{[2
]}

Ito, S. ^{[2
]}

Yamashita, C. ^{[2
]}

Mayama, N. ^{[2
]}

Iwata, T. ^{[2
]}

Nojima, M. ^{[3
]}

Taniguchi, M. ^{[4
]}

Owari, M. ^{[1
,2
]}

机构：

[1] Univ Tokyo, Ctr Environm Sci, Bunkyo Ku, Tokyo 1130033, Japan

[2] Univ Tokyo, Inst Ind Sci, Meguro Ku, Tokyo 1538505, Japan

[3] Tokyo Univ Sci, Fac Sci & Technol, Chiba 2788510, Japan

[4] Kanazawa Inst Technol, Div Chem, Coll Env Eng & Arch, Nonoichi, Ishikawa 9218501, Japan

来源：

SURFACE AND INTERFACE ANALYSIS | 2008年 / 40卷 / 13期

关键词：

atom probe; molybdenum; time-of-flight; field evaporation; laser assist;

D O I：

10.1002/sia.2962

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

This paper reports the evaluation and operation of laser pulse assisted three-dimensional atom probe (3DAP). With wide angle acceptance using femto second pulse laser, high speed time to digital converter, and newly designed sample-extraction electrode integrated sample holder, we can get high performance, easy to treat and wide angle 3DAP. The change of the resolution in the application to pure metals such as Mo was observed when the laser condition (laser polarization and implied voltage) was changed. Copyright (C) 2008 John Wiley & Sons, Ltd.

引用

页码：1688 / 1691

页数：4

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