A test object with three certified linewidth dimensions for a scanning electron microscope

被引：5
作者：
Danilova, M. A.
Mityukhlyaev, V. B.
Novikov, Yu. A. [1 ]
Ozerin, Yu. V.
Rakov, A. V. [1 ]
Todua, P. A.
机构：
[1] Russian Acad Sci, Prokhorov Inst Gen Phys, Moscow 117901, Russia
来源：
MEASUREMENT TECHNIQUES | 2008年 / 51卷 / 09期
关键词：
scanning electron microscope; test object; linewidth; linear dimensions of the relief structures;
D O I：
10.1007/s11018-008-9152-8
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A test object for a scanning electron microscope, which has a trapezoidal profile of the relief with large angles of inclination of the side walls, is developed. The test object contains elements (protrusions) with three certified dimensions of the linewidth, situated in two mutually perpendicular directions.
引用
收藏
页码：998 / 1003
页数：6
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