Effect of heat treatments and coatings on the outgassing rate of stainless steel chambers

The outgassing rates of three nominally identical 304L stainless steel vacuum chambers were measured to determine the effect of chamber coatings and heat treatments. One chamber was coated with titanium nitride (TiN) and one with amorphous silicon (a-Si) immediately following fabrication. The last chamber was first tested without any coating and then coated with a-Si following a series of heat treatments. The outgassing rate of each chamber was measured at room temperatures between 15 and 30 degrees C following bakes at temperatures between 90 and 400 degrees C. Measurements for bare steel showed a significant reduction in the outgassing rate by nearly a factor of 20 after a 400 degrees C heat treatment (3.5 x 10(-12) Torr L s(-1) cm(-2) prior to heat treatment, reduced to 1.7 x 10(-13) Torr L s(-1) cm(-2) following heat treatment). The chambers that were coated with a-Si showed minimal change in outgassing rates with heat treatment, though an outgassing rate reduced by heat treatments prior to a-Si coating was successfully preserved throughout a series of bakes. The TiN coated chamber exhibited remarkably low outgassing rates, up to four orders of magnitude lower than the uncoated stainless steel, but the uncertainty in these rates is large due to the sensitivity limitations of the spinning rotor gauge accumulation measurement and the possibility of a small pump speed due to inhomogeneity in the TiN coating. The outgassing results are discussed in terms of diffusion-limited versus recombination-limited processes. (C) 2014 American Vacuum Society.