Spectroscopic characterisation of a cross-flow plasma jet

被引:4
|
作者
Anghel, S. D. [1 ]
Simon, A. [1 ]
Radu, A. I. [1 ]
Hidi, I. J. [1 ]
机构
[1] Univ Babes Bolyai, Fac Phys, Cluj Napoca 400084, Romania
关键词
APPJ; Helium; RF discharge; Plasma parameters; Optical emission; SURFACE MODIFICATION; INACTIVATION; DIAGNOSTICS;
D O I
10.1016/j.nimb.2008.10.026
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
The aim of this work is to study the thermal characteristics and electron density based on atomic and molecular emission of a new plasma jet at atmospheric pressure. The novelty of our jet is its generation with a single electrode, the plasma gas flowing perpendicularly to the RF powered electrode (13.56 MHz, 10(3) V). Optical emission of the plasma was collected in two ways: the normal viewing mode and the axial viewing mode. The plasma characteristic parameters as function of helium flow-rate, plasma power and position of the investigated zone were studied. The excitation, vibrational and rotational temperatures are in the range of 1500-2350 K, 3500-4400 K and 450-1100 K, respectively. The electron number densities are in the range of 10(13)-10(14) cm(-3). For qualitative observations regarding the atomic and molecular processes in the plasma we used the relative intensities of the most representative lines of He, N-2, O, H and N-2(+). (c) 2008 Elsevier B.V. All rights reserved.
引用
收藏
页码:430 / 433
页数:4
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