Simulation of a direct current microplasma discharge in helium at atmospheric pressure

被引:188
作者
Wang, Qiang [1 ]
Economou, Demetre J. [1 ]
Donnelly, Vincent M. [1 ]
机构
[1] Univ Houston, Dept Chem Engn, Plasma Proc Lab, Houston, TX 77204 USA
基金
美国国家科学基金会;
关键词
D O I
10.1063/1.2214591
中图分类号
O59 [应用物理学];
学科分类号
摘要
A numerical simulation of a dc microplasma discharge in helium at atmospheric pressure was performed based on a one-dimensional fluid model. The microdischarge was found to resemble a macroscopic low pressure dc glow discharge in many respects. The simulation predicted the existence of electric field reversals in the negative glow under operating conditions that favor a high electron diffusion flux emanating from the cathode sheath. The electric field adjusts to satisfy continuity of the total current. Also, the electric field in the anode layer is self adjusted to be positive or negative to satisfy the "global" particle balance in the plasma. Gas heating was found to play an important role in shaping the electric field profiles both in the negative glow and the anode layer. Basic plasma properties such as electron temperature, electron density, gas temperature, and electric field were studied. Simulation results were in good agreement with experimental observations. (c) 2006 American Institute of Physics.
引用
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页数:10
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