Optimization Process for Polynomial Motion Profiles to Achieve Fast Movement With Low Vibration

Since fast and accurate motion profiles are directly related to the productivity of manufacturing, many studies have been performed to optimize such motion profiles. However, previous research has not provided an appropriate solution regarding which motion profile is the best for a given situation. Therefore, in this article, we propose an optimization process for polynomial-function-based motion profiles to achieve fast movement with low vibration. The proposed process describes a method of optimizing an nth-order polynomial motion profile to achieve a fast transfer time and minimal residual vibration characteristics with extra robustness to system uncertainty for a given moving distance and given actuator capacities. Then, we describe how to determine the best order of the optimized motion profile for given conditions, such as the allowable computational load, the required residual vibration bound, and the required robustness against system uncertainties. The performance of the optimized motion profile is demonstrated, and the suggested process for obtaining the best order of the optimal motion profile is applied to a practical example of a wafer transfer robot.