Miniaturized surface-driven electrostatic actuators: Design and performance evaluation

被引：35
作者：
Gao, RX
Fang, J
Rao, B
Warrington, RO
机构：
[1] LOUISIANA TECH UNIV,INST MICROMANUFACTURING,RUSTON,LA 71272
[2] PURDUE UNIV,SCH MECH ENGN,W LAFAYETTE,IN 47907
来源：
IEEE-ASME TRANSACTIONS ON MECHATRONICS | 1997年 / 2卷 / 01期
关键词：
electrostatic actuators; linear and rotary type; FEM for electric field distribution; modified PCB process; surface-driven design;
D O I：
10.1109/3516.558852
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
A series of miniaturized, surface-driven rotary and linear electrostatic actuators was designed and fabricated, Finite element analysis method was used to aid in the design and analysis of the electrostatic drive mechanism, The actuators, consisting mainly of a copper-coated 200-mu m-thick glass epoxy stator board and a 34-mu m-thick carbon-coated polyethyleneterephthalate (PET) film slider, were fabricated using modified printed circuit board (PCB) techniques, These actuators, able to carry mechanical loads up to 375 times their own weight, can be used as micro conveyers or robots in an automated micromachine assembly environment for a wide range of applications.
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页码：1 / 7
页数：7
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