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Integrated optics in silicon: Coming of age
被引：8
作者：
Harpin, A
机构：
来源：
SILICON-BASED MONOLITHIC AND HYBRID OPTOELECTRONIC DEVICES
|
1997年
/
3007卷
关键词：
silicon on insulator;
integrated optics;
silicon integrated optics;
active devices;
waveguides;
optical switching;
optical transceivers;
passive fibre alignment;
V grooving;
hybridisation;
plasma dispersion;
D O I：
10.1117/12.273845
中图分类号：
O43 [光学];
学科分类号：
070207 ;
0803 ;
摘要：
This paper describes the maturation of silicon on insulator(SOI) technology in integrated optics. Results are presented of optical elements, showing their viability in such fields as telecommunications. Low cost packaging schemes are presented, allowing passive alignment of optical fibres in etched V grooves to the single mode ridge waveguides with an excess loss < 0.5 dB. We then discuss device applications for this technology.
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页码：128 / 135
页数：8
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