Rapid thermal conductivity measurements for combinatorial thin films

被引：8

作者：

McDowell, Matthew G. ^{[1
]}

Hill, Ian G. ^{[1
]}

机构：

[1] Dalhousie Univ, Dept Phys, Halifax, NS B3H 4R2, Canada

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2013年 / 84卷 / 05期

基金：

加拿大创新基金会; 加拿大自然科学与工程研究理事会;

关键词：

3-OMEGA METHOD; SIO2-FILMS;

D O I：

10.1063/1.4807898

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A simple and inexpensive automated method for determining the thermal conductivity of a combinatorial library of thin films is demonstrated by measuring the thermal conductivity of a sputtered silicon dioxide film of varying thickness deposited on single crystal silicon. Using 3 omega measurements, two methods for calculating the substrate thermal conductivity and two methods for determining the film thermal conductivity are demonstrated and compared. The substrate thermal conductivity was found to be 139 +/- 3 W/m . K. Using the measured variation in film thickness, the film thermal conductivity was found to be 1.11 +/- 0.05 W/m . K, in excellent agreement with published values for sputtered SiO2, demonstrating the accuracy of the method. (C) 2013 AIP Publishing LLC.

引用

页数：5

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