Analysis of sheath electric fields in a radio-frequency discharge in helium

被引：4
作者：
Choi, YW
Bowden, M
Muraoka, K
机构：
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1996年 / 35卷 / 11A期
关键词：
electric field; radio-frequency discharge; helium discharge; laser induced fluorescence; sheaths;
D O I：
10.1143/JJAP.35.L1459
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Electric fields in the sheath region of a radio-frequency discharge in helium were measured using laser induced fluorescence spectroscopy. Electric field distributions and sheath widths were determined for discharges operated at pressures in the range of 0.2-1.6 Torr. The experimental results are found to be predicted well by a theory in which collisions in the sheath are dominant.
引用
收藏
页码：L1459 / L1461
页数：3
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