Application of a laser-speckle correlation technique for measuring local strain in micromaterials

被引:4
作者
Schneider, SC
Zagar, B
Zimprich, P
机构
[1] Johannes Kepler Univ Linz, Inst Elektr Messtech, A-4040 Linz, Austria
[2] Univ Vienna, Fak Phys, Inst Mat Phys, A-1090 Vienna, Austria
关键词
laser-speckle correlation; strain measurement; micromaterials;
D O I
10.1524/teme.2006.73.1.26
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Non-contact strain measurements of materials with micrometer dimensions, like used in microelectronics and microsystems, are rapidly expanding fields in materials science. Mechanical properties of "micromaterials" can differ significantly from those determined from their bulk analogs. Materials testing in small dimensions is necessary to enhance the reliability of microsystems. Optical methods circumventing surface marking or preparation therefore play an important role and open new testing possibilities where standard testing techniques cannot be used.
引用
收藏
页码:26 / 34
页数:9
相关论文
共 16 条
[1]   Noncontacting strain measurements at high temperatures by the digital laser speckle technique [J].
Anwander, M ;
Zagar, BG ;
Weiss, B ;
Weiss, H .
EXPERIMENTAL MECHANICS, 2000, 40 (01) :98-105
[2]   Thermal and mechanical properties of micromaterials using laseroptical strain sensors [J].
Anwander, M ;
Hadrboletz, A ;
Weiss, B ;
Zagar, B .
ADVANCED PHOTONIC SENSORS AND APPLICATIONS, 1999, 3897 :404-413
[3]   Overview no. 130 - Size effects in materials due to microstructural and dimensional constraints: A comparative review [J].
Arzt, E .
ACTA MATERIALIA, 1998, 46 (16) :5611-5626
[4]  
BEITZ W, DUBBEL TASCHENBUCH M
[5]  
Goodman J. W., 1984, LASER SPECKLE RELATE
[6]  
Izawa Y, 1998, EXPERIMENTAL MECHANICS, VOLS 1 AND 2, P667
[7]  
MICHEL B, 2000, MICRO MAT
[8]   MECHANICAL-PROPERTIES OF THIN-FILMS [J].
NIX, WD .
METALLURGICAL TRANSACTIONS A-PHYSICAL METALLURGY AND MATERIALS SCIENCE, 1989, 20 (11) :2217-2245
[9]   Application of a locally operating laser-speckle strain sensor [J].
Schneider, SC ;
Gautam, Y ;
Zagar, BG .
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 2003, 52 (04) :1025-1029
[10]  
SCHNEIDER SC, 2005, THESIS J KEPLER U LI