Influence of nondiamond carbon etching on field emission property of highly sp2 bonded nanocrystalline diamond films

被引：0
作者：
Shim, JY [1 ]
Yoon, HS
Lee, JH
Lee, KKH
Baik, HK
机构：
[1] Elect & Telecommun Res Inst, Compound Semicond Dept, Micro Elect Technol Lab, Taejon 305350, South Korea
[2] Yonsei Univ, Sch Mat Sci, Seoul 120749, South Korea
[3] Yonsei Univ, Sch Engn, Seoul 120749, South Korea
来源：
JOURNAL OF THE KOREAN PHYSICAL SOCIETY | 2001年 / 39卷
关键词：
D O I：
暂无
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
The influence of the nondiamond carbon etching on the electron field emission behavior of highly sp(2) bonded nanocrystalline diamond films has been Systematically investigated by performing hydrogen treatment. Field emission property and emission pattern of the films are initially enhanced and then degraded with the hydrogen treatment. The most uniform distribution of emission site is obtained for one-minute hydrogen-treated film. The reason for this is explained in terms of the increase of triple junction sites due to etching of the sp(2) bonded carbon (nondiamond carbon) by atomic hydrogen. Oil the other hand, the degraded emission property of the filius treated over 10 ruin is due to the decrease of triple junction, which is indirectly confirmed by Raman and Auger electron spectroscopies.
引用
收藏
页码：S467 / S471
页数：5
相关论文
共 16 条
[1]   Electron affinity and Schottky barrier height of metal-diamond (100), (111), and (110) interfaces [J].
Baumann, PK ;
Nemanich, RJ .
JOURNAL OF APPLIED PHYSICS, 1998, 83 (04) :2072-2082
[2]   ELECTRON FIELD-EMISSION FROM DIAMOND AND OTHER CARBON MATERIALS AFTER H-2, O-2 AND CS TREATMENT [J].
GEIS, MW ;
TWICHELL, JC ;
MACAULAY, J ;
OKANO, K .
APPLIED PHYSICS LETTERS, 1995, 67 (09) :1328-1330
[3]   X-ray absorption and Auger electron spectroscopy studies of the quality of diamond thin films grown by the oxy-acetylene flame method [J].
Gutierrez, A ;
Lopez, MF ;
Garcia, I ;
Vazquez, A .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1997, 15 (02) :294-297
[4]   QUANTUM PHOTOYIELD OF DIAMOND(111) - STABLE NEGATIVE-AFFINITY EMITTER [J].
HIMPSEL, FJ ;
KNAPP, JA ;
VANVECHTEN, JA ;
EASTMAN, DE .
PHYSICAL REVIEW B, 1979, 20 (02) :624-627
[5]  
Kang SY, 1999, J KOREAN PHYS SOC, V35, pS444
[6]   Electron field emission from thin fine-grained CVD diamond films [J].
Lacher, F ;
Wild, C ;
Behr, D ;
Koidl, P .
DIAMOND AND RELATED MATERIALS, 1997, 6 (09) :1111-1116
[7]  
Lee JD, 1999, J KOREAN PHYS SOC, V35, pS1102
[8]  
Park KH, 2000, J KOREAN PHYS SOC, V37, pL153
[9]   THE DIAMOND SURFACE - ATOMIC AND ELECTRONIC-STRUCTURE [J].
PATE, BB .
SURFACE SCIENCE, 1986, 165 (01) :83-142
[10]   DIAMOND SYNTHESIS FROM VAPOR-PHASE AND ITS GROWTH-PROCESS [J].
SETAKA, N .
JOURNAL OF MATERIALS RESEARCH, 1989, 4 (03) :664-670
12