Silicon Micromachined Lens Antenna for THz Integrated Heterodyne Arrays

被引：48

作者：

Llombart, N. ^{[1
]}

Lee, C. ^{[3
]}

Alonso-delPino, M. ^{[2
]}

Chattopadhyay, G. ^{[3
]}

Jung-Kubiak, C. ^{[3
]}

Jofre, L. ^{[2
]}

Mehdi, I. ^{[3
]}

机构：

[1] Univ Complutense Madrid, Dept Opt, E-28040 Madrid, Spain

[2] Tech Univ Catalonia, Signal Theory & Commun Dept, Barcelona 08034, Spain

[3] CALTECH, Jet Prop Lab, Pasadena, CA 91109 USA

来源：

IEEE TRANSACTIONS ON TERAHERTZ SCIENCE AND TECHNOLOGY | 2013年 / 3卷 / 05期

基金：

美国国家航空航天局;

关键词：

Lens; leaky wave antennas; silicon fabrication; terahertz (THz);

D O I：

10.1109/TTHZ.2013.2270300

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, we present the design, fabrication, and measurements of a lens THz antenna that can be fabricated using conventional photolithography and deep reactive etching processes. The antenna is composed of an extended hemispherical silicon lens and a leaky wave waveguide feed. Both elements are fabricated using silicon micromachining techniques, enabling the fabrication of future large antenna arrays with a parallel process. To show the concept, a first antenna prototype has been fabricated using this fabrication process. Measurements obtained at 550 GHz are presented.

引用

页码：515 / 523

页数：9

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