Scaling MOSFETs to 10 nm: Coulomb effects, source starvation, and virtual source model

被引:46
作者
Fischetti, M. V. [1 ]
Jin, S. [2 ]
Tang, T. -W. [1 ]
Asbeck, P. [3 ]
Taur, Y. [3 ]
Laux, S. E. [4 ]
Rodwell, M. [5 ]
Sano, N. [6 ]
机构
[1] Univ Massachusetts, Dept Elect & Comp Engn, Amherst, MA 01003 USA
[2] Synopsys Inc, Mountain View, CA 94043 USA
[3] Univ Calif San Diego, Dept Elect & Comp Engn, San Diego, CA 92092 USA
[4] IBM SRDC, Div Res, TJ Watson Res Ctr, Yorktown Hts, NY 10598 USA
[5] Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
[6] Univ Tsukuba, Inst Appl Phys, Tsukuba, Ibaraki 3058573, Japan
关键词
MOSFETs scaling; Coulomb interaction; Source starvation; Virtual source;
D O I
10.1007/s10825-009-0277-z
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In our attempts to scale FETs to the 10 nm length, alternatives to conventional Si CMOS are sought on the grounds that: (1) Si seems to have reached its technological and performance limits and (2) the use of alternative high-mobility channel materials will provide the missing performance. With the help of numerical simulations here we establish the reasons why indeed Si seems to have hit an intrinsic performance barrier and whether or not high mobility semiconductors can indeed grant us our wishes. The role of long-and short-range electron-electron interactions are revisited together with a recent analysis of the historical performance trends. The density-of-states (DOS) bottleneck and source starvation issues are also reviewed to see what advantage alternative substrates may bring us. Finally, the well-known 'virtual source model' is analyzed to assess whether it can be used as a quantitative tool to guide us to the 10 nm gate length.
引用
收藏
页码:60 / 77
页数:18
相关论文
共 46 条
[1]   A detailed experimental investigation of impact ionization in n-channel metal-oxide-semiconductor field-effect-transistors at very low drain voltages [J].
Anil, KG ;
Mahapatra, S ;
Eisele, I .
SOLID-STATE ELECTRONICS, 2003, 47 (06) :995-1001
[2]   Experimental verification of the nature of the high energy tail in the electron energy distribution in n-channel MOSFETs [J].
Anil, KG ;
Mahapatra, S ;
Eisele, I .
IEEE ELECTRON DEVICE LETTERS, 2001, 22 (10) :478-480
[3]  
[Anonymous], 2002, IBM RES DEV, V46, P119
[4]  
Antoniadis DA, 2008, INT EL DEVICES MEET, P253
[5]   Experimental Investigation on the Quasi-Ballistic Transport: Part II-Backscattering Coefficient Extraction and Link With the Mobility [J].
Barral, Vincent ;
Poiroux, Thierry ;
Munteanu, Daniela ;
Autran, Jean-Luc ;
Deleonibus, Simon .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2009, 56 (03) :420-430
[6]   Experimental Investigation on the Quasi-Ballistic Transport: Part I-Determination of a New Backscattering Coefficient Extraction Methodology [J].
Barral, Vincent ;
Poiroux, Thierry ;
Saint-Martin, Jerome ;
Munteanu, Daniela ;
Autran, Jean-Luc ;
Deleonibus, Simon .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2009, 56 (03) :408-419
[7]   Resonant hole localization and anomalous optical bowing in InGaN alloys [J].
Bellaiche, L ;
Mattila, T ;
Wang, LW ;
Wei, SH ;
Zunger, A .
APPLIED PHYSICS LETTERS, 1999, 74 (13) :1842-1844
[8]   Localization and percolation in semiconductor alloys: GaAsN vs GaAsP [J].
Bellaiche, L ;
Wei, SH ;
Zunger, A .
PHYSICAL REVIEW B, 1996, 54 (24) :17568-17576
[9]  
Chau R., 2002, International Conference on Solid State Devices and Materials, P68
[10]  
Cros A., 2006, INT ELECT DEVICES M, P663