Dependence of Electrical and Optical Properties of Sol-gel-derived SnO2 Thin Films on Sb-substitution

被引:7
作者
Muhire, Elisee [1 ]
Yang, Jiao [2 ]
Huo, Xuejian [1 ]
Gao, Meizhen [1 ]
机构
[1] Lanzhou Univ, Sch Phys Sci & Technol, Minist Educ, Key Lab Magnetism & Magnet Mat, Lanzhou 730000, Gansu, Peoples R China
[2] Henan Univ Sci & Technol, Sch Phys & Engn, Luoyang 471003, Henan, Peoples R China
来源
MATERIALS SCIENCE-MEDZIAGOTYRA | 2019年 / 25卷 / 01期
基金
中国国家自然科学基金;
关键词
SnO2 thin films; spin-coating; optical constants; resistivity; TIN OXIDE; THICKNESS; OXIDATION;
D O I
10.5755/j01.ms.25.1.19172
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In the present work, Sb-doped SnO2 (ATO) thin films were deposited on Si substrates by spin-coating method and the influence of Sb-doping on surface roughness, structural, optical and electrical properties has been investigated. AFM measurements show that the surface roughness decreases with increasing the Sb-doping concentration up to 5 mol%. XRD results confirm that all prepared ATO films have a tetragonal ruffle structure of tin oxide. It has been observed that both the crystallite size and the extinction coefficient decrease with increasing Sb-doping concentration up to 5 mol%, while the refractive index increases with increasing Sb-doping concentration. The electrical resistivity decreases with increasing Sb-doping concentration, and the lowest resistivity obtained is 8.5 X 10(-3)Omega.cm for SnO2 doped with 7.5 mol% of Sb.
引用
收藏
页码:21 / 27
页数:7
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