Experimental study of moire method in laser scanning confocal microscopy

被引:13
作者
Pan, B
Xie, HM [1 ]
Kishimoto, S
Xing, YM
机构
[1] Tsing Hua Univ, Dept Engn Mech, Beijing 100084, Peoples R China
[2] Natl Inst Mat Sci, Mat Engn Lab, Tsukuba, Ibaraki 3050047, Japan
[3] Inner Mongolia Univ, Dept Appl Mech, Hohhot 010062, Peoples R China
基金
中国国家自然科学基金; 高等学校博士学科点专项科研基金;
关键词
D O I
10.1063/1.2186810
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
By integrating moire method with laser scanning confocal microscopy (LSCM), a novel class of moire patterns, i.e., LSCM moire patterns, is presented and investigated by experiment in this article. The moire patterns are formed by the interference of a 1200 line/mm cross-line holographic grating and the scanning lines of LSCM. The principles and conditions of forming LSCM moire are described in detail. The measured parameters of moire fringes from experimental images agree well with theoretical analysis. The experimental results verify the feasibility and reality of the proposed moire method to be another effective and high accuracy technique for measuring and observing in-plane microdeformation at micrometer scale. (c) 2006 American Institute of Physics.
引用
收藏
页数:5
相关论文
共 12 条
[1]  
[Anonymous], 2005, ENCY BIOMATERIALS BI
[2]   Moire in atomic force microscope [J].
Chen, H ;
Liu, D ;
Lee, A .
EXPERIMENTAL TECHNIQUES, 2000, 24 (01) :31-32
[3]   ELECTRON-BEAM MOIRE [J].
DALLY, JW ;
READ, DT .
EXPERIMENTAL MECHANICS, 1993, 33 (04) :270-277
[4]   Moire interferometry for engineering mechanics: current practices and future developments [J].
Han, B ;
Post, D ;
Ifju, P .
JOURNAL OF STRAIN ANALYSIS FOR ENGINEERING DESIGN, 2001, 36 (01) :101-117
[5]  
Kishimoto S., 1991, Journal of the Society of Materials Science, Japan, V40, P637, DOI 10.2472/jsms.40.637
[6]   Moire pattern in scanning tunneling microscopy: Mechanism in observation of subsurface nanostructures [J].
Kobayashi, K .
PHYSICAL REVIEW B, 1996, 53 (16) :11091-11099
[7]   A novel nano-Moire method with scanning tunneling microscope (STM) [J].
Liu, ZW ;
Xie, HM ;
Fang, DN ;
Shang, HX ;
Dai, FL .
JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 2004, 148 (01) :77-82
[8]   Thermal deformation measurement of electronic packages using the atomic force microscope scanning moire technique [J].
Lu, YG ;
Zhong, ZW ;
Yu, J ;
Xie, HM ;
Ngoi, BKA ;
Chai, GB ;
Asundi, A .
REVIEW OF SCIENTIFIC INSTRUMENTS, 2001, 72 (04) :2180-2185
[9]  
Post D., 1994, High Sensitivity Moire: Experimental Analysis for Mechanics and Materials
[10]   SCANNING MOIRE AT HIGH MAGNIFICATION USING OPTICAL METHODS [J].
READ, DT ;
DALLY, JW ;
SZANTO, M .
EXPERIMENTAL MECHANICS, 1993, 33 (02) :110-116