Flexible Hotspot Detection Based on Fully Convolutional Network With Transfer Learning

Layout hotspot detection is one of the most important issues for the reliability enhancement of integrated circuits. Machine learning-based hotspot detectors have shown their advantages of efficiency and generalization compared with computationally intensive lithography process simulation. However, most machine learning-based hotspot detectors only accept layout clips of fixed size as input with the potential defect whose location is restricted at the center of each clip. Therefore, they cannot be used directly for multiple hotspots detection in a large area, which occurs frequently in real design cases. In this article, we build a new end-to-end hotspot detector based on a fully convolutional network, which has the flexibility of detecting a various number of hotspots in a layout of any size at one time. Moreover, we also develop a transfer learning scheme matching our proposed detector network, which can reduce the requirement of sample number when setting up a new model for a more advanced technology node. The experimental results demonstrate our proposed hotspot detector outstanding among state-of-the-art works and the transfer learning scheme is effective.