High Scale-Factor Stability Frequency-Modulated MEMS Gyroscope: 3-Axis Sensor and Integrated Electronics Design

被引：56

作者：

Minotti, Paolo ^{[1
]}

Dellea, Stefano ^{[1
]}

Mussi, Giorgio ^{[1
]}

Bonfanti, Andrea ^{[1
]}

Facchinetti, Stefano ^{[2
]}

Tocchio, Alessandro ^{[2
]}

Zega, Valentina ^{[3
]}

Comi, Claudia ^{[3
]}

Lacaita, Andrea Leonardo ^{[1
]}

Langfelder, Giacomo ^{[1
]}

机构：

[1] Politecn Milan, Dipartimento Elettron Informaz & Bioingn, I-20133 Milan, Italy

[2] STMicroelectronics, Analog & MEMS Grp, I-20010 Milan, Italy

[3] Politecn Milan, Dipartimento Ingn Civile & Ambientale, I-20133 Milan, Italy

来源：

IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS | 2018年 / 65卷 / 06期

关键词：

Frequency modulation; gyroscopes; microelectromechanical devices; TO-DIGITAL CONVERTER; PHASE NOISE; OSCILLATOR; INDUSTRIAL;

D O I：

10.1109/TIE.2017.2772212

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

This paper reports the developments toward an integrated, tri-axial, frequency-modulated, consumer-grade, and microelectromechanical system (MEMS) gyroscope. A custom low-power (160 mu A), low-phase-noise integrated circuit is designed specifically for frequency-modulated operation. Both yaw- and pitch-rate sensing systems are demonstrated by coupling the circuit with two novel micromachined structures fabricated with a 24-mu m-thick industrial process. In operation, both gyroscopes show a repeatable and stable scale factor, with less than 0.55% of part-to-part variability, obtained with no any calibration, and 35 ppm/degrees C of variability over a 25-70 degrees C temperature range.

引用

页码：5040 / 5050

页数：11

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