A novel MEMS omnidirectional inertial switch with flexible electrodes

被引：36

作者：

Xi Zhanwen ^{[1
]}

Zhang Ping ^{[1
]}

Nie Weirong ^{[1
]}

Du Liqun ^{[2
]}

Cao Yun ^{[1
]}

机构：

[1] Nanjing Univ Sci & Technol, Sch Mech Engn, Nanjing 210094, Jiangsu, Peoples R China

[2] Dalian Univ Technol, Sch Mech Engn, Dalian 116024, Peoples R China

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2014年 / 212卷

基金：

中国国家自然科学基金;

关键词：

Omnidirectional inertial switch; MEMS; Flexible electrode; Enhanced contact effect; SYSTEMS;

D O I：

10.1016/j.sna.2014.02.035

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A novel MEMS omnidirectional inertial switch was designed, simulated and fabricated. The switch is composed of three main parts, the proof mass, the axial flexible electrode and four radial flexible electrodes. It introduces the flexible electrodes to form a dual mass-spring system. The switch has omnidirectional sensitivities in a half sphere. When any acceleration, over the threshold value in radial on and axial direction, acts to the switch, the switch will turn on. Also, the switch has the enhanced contact effect. Dynamic simulation results based on FEM confirm that the contact effect is improved by this new design compared to that of traditional inertial switch. The contact duration is prolonged under the shock loading, and the bouncing effect is alleviated. The switch has a 6-layer structure, which is manufactured based on non-silicon surface micromachining technology. The tests have been done and the results coincide with that of the simulation. (c) 2014 Elsevier B.V. All rights reserved.

引用

页码：93 / 101

页数：9

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