Silicon Nanoparticles Formed via Pulsed Laser Ablation of Porous Silicon in Liquids

被引:10
作者
Skobelkina, A. V. [1 ]
Kashaev, F. V. [1 ]
Kolchin, A. V. [1 ]
Shuleiko, D. V. [1 ]
Kaminskaya, T. P. [1 ]
Presnov, D. E. [1 ,2 ,3 ]
Golovan, L. V. [1 ]
Kashkarov, P. K. [1 ,4 ]
机构
[1] Moscow MV Lomonosov State Univ, Fac Phys, Moscow 119991, Russia
[2] Moscow MV Lomonosov State Univ, Skobeltsyn Res Inst Nucl Phys, Moscow 119991, Russia
[3] Moscow MV Lomonosov State Univ, Ctr Quantum Technol, Moscow 119991, Russia
[4] Kurchatov Inst, Natl Res Ctr, Moscow 123182, Russia
基金
俄罗斯科学基金会;
关键词
pulsed laser ablation; porous silicon; atomic force microscopy; ablation threshold;
D O I
10.1134/S1063785020070263
中图分类号
O59 [应用物理学];
学科分类号
摘要
Picosecond pulsed laser ablation of meso- and microporous silicon layers in water and ethanol leads to the formation of nanosilicon suspensions with particle diameters below 100 nm. It is established that the use of porous silicon targets allows the laser ablation threshold to be reduced and the nanoparticle concentration increased as compared to the ablation of crystalline silicon.
引用
收藏
页码:687 / 690
页数:4
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