Lattice Structure for a Critically Damped High-G MEMS Accelerometer

被引：0

作者：

Baldasarre, Leonardo ^{[1
]}

Tocchio, Alessandro ^{[1
]}

Urquia, Mikel Azpeitia ^{[1
]}

Zerbini, Sarah ^{[1
]}

机构：

[1] STMicroelectronics, Analog MEMS & Sensor Grp, I-20010 Cornaredo, MI, Italy

来源：

2013 SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS (DTIP) | 2013年

关键词：

MEMS; Automotive; high-G accelerometer; squeeze film damping;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A novel design for high-G capacitive MEMS accelerometers that allows for a critically damped dynamical response is presented. The high damping condition is achieved by reducing the mass while keeping a high rigidity of the sensor through a lattice-like mechanical structure. Compared to previously proposed solutions, this design allows for smaller and more reliable sensors.

引用

页数：2

共 6 条

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