Laser-machined fibers as Fabry-Perot pressure sensors

被引：43

作者：

Watson, Stuart ^{[1
]}

Gander, Matthew J.

MacPherson, William N.

Barton, James S.

Jones, Julian D. C.

Klotzbuecher, Thomas

Braune, Torsten

Ott, Johannes

Schmitz, Felix

机构：

[1] Heriot Watt Univ, Sch Engn & Phys Sci, Edinburgh EH14 4AS, Midlothian, Scotland

[2] Inst Mikrotech Mainz GmbH, D-55129 Mainz, Germany

来源：

APPLIED OPTICS | 2006年 / 45卷 / 22期

基金：

英国工程与自然科学研究理事会;

关键词：

D O I：

10.1364/AO.45.005590

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Cavities have been laser ablated in the ends of single-mode optical fibers and sealed by aluminized polycarbonate diaphragms to produce Fabry-Perot pressure sensors. Both conventional fibers and novel, multicore fibers were used, demonstrating the possibility of producing compact arrays of sensors and multiple sensors on an individual fiber 125 mu m in diameter. This high spatial resolution can be combined with high temporal resolution by simultaneously interrogating the sensors by using separate laser sources at three wavelengths. Shock tube tests showed a sensor response time of 3 mu s to a step increase in pressure. (C) 2006 Optical Society of America.

引用

页码：5590 / 5596

页数：7

共 16 条

[1] Novel MEMS pressure and temperature sensors fabricated on optical fibers [J].

Abeysinghe, DC ;

Dasgupta, S ;

Jackson, HE ;

Boyd, JT .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2002, 12 (03) :229-235

[2] A novel MEMS pressure sensor fabricated on an optical fiber [J].

Abeysinghe, DC ;

Dasgupta, S ;

Boyd, JT ;

Jackson, HE .

IEEE PHOTONICS TECHNOLOGY LETTERS, 2001, 13 (09) :993-995

[3] Miniature optical fibre ultrasonic hydrophone using a Fabry-Perot polymer film interferometer [J].

Beard, PC ;

Mills, TN .

ELECTRONICS LETTERS, 1997, 33 (09) :801-803

[4] Miniature fiber-optic pressure sensor with a polymer diaphragm [J].

Cibula, E ;

Donlagic, D .

APPLIED OPTICS, 2005, 44 (14) :2736-2744

[5] Two-axis bend measurement with Bragg gratings in multicore optical fiber [J].

Flockhart, GMH ;

MacPherson, WN ;

Barton, JS ;

Jones, JDC ;

Zhang, L ;

Bennion, I .

OPTICS LETTERS, 2003, 28 (06) :387-389

[6] Embedded micromachined fiber-optic Fabry-Perot pressure sensors in aerodynamics applications [J].

Gander, MJ ;

MacPherson, WN ;

Barton, JS ;

Reuben, RL ;

Jones, JDC ;

Stevens, R ;

Chana, KS ;

Anderson, SJ ;

Jones, TV .

IEEE SENSORS JOURNAL, 2003, 3 (01) :102-107

[7]

Giovanni M. D., 1992, FLAT CORRUGATED DIAP

[8] Measurement of unsteady gas temperature with optical fibre Fabry-Perot microsensors [J].

Kilpatrick, JM ;

MacPherson, WN ;

Barton, JS ;

Jones, JDC ;

Buttsworth, DR ;

Jones, TV ;

Chana, KS ;

Anderson, SJ .

MEASUREMENT SCIENCE AND TECHNOLOGY, 2002, 13 (05) :706-712

[9] Custom specific fabrication of integrated optical devices by excimer laser ablation of polymers [J].

Klotzbücher, T ;

Popp, M ;

Braune, T ;

Haase, J ;

Gaudron, A ;

Smaglinski, I ;

Paatzsch, T ;

Bauer, HD ;

Ehrfeld, W .

LASER APPLICATIONS IN MICROELECTRONIC AND OPTOELECTRONIC MANUFACTURING V, 2000, 3933 :290-298

[10] Phase demodulation in optical fibre Fabry-Perot sensors with inexact phase steps [J].

MacPherson, WN ;

Kidd, SR ;

Barton, JS ;

Jones, JDC .

IEE PROCEEDINGS-OPTOELECTRONICS, 1997, 144 (03) :130-133

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