共 22 条
[1]
Benagli S., 2009, 24th EU PVSEC, P21
[3]
Hydrogen collision model: Quantitative description of metastability in amorphous silicon
[J].
PHYSICAL REVIEW B,
1999, 59 (08)
:5498-5512
[4]
A FULLY AUTOMATED HOT-WALL MULTIPLASMA-MONOCHAMBER REACTOR FOR THIN-FILM DEPOSITION
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1991, 9 (04)
:2331-2341
[5]
Cabarrocas PRI, 2002, THIN SOLID FILMS, V403, P39, DOI 10.1016/S0040-6090(01)01656-X
[7]
CABARROCAS PRI, 1998, P 2 WORLD C EXH PHOT, P355
[9]
Carlson DE, 1996, APPL PHYS LETT, V68, P28, DOI 10.1063/1.116745