The performance evaluation of a copper omega type Coriolis mass flow sensor using an adaptive neuro-fuzzy inference system (ANFIS) has been studied for influencing input design parameters. The exhaustive experimentation has been carried out under various operational conditions and further this data set is utilized for modeling using ANFIS. The results are in good agreement with the experimental results stating that this technique may be applied to predict the performance of mass flow sensor. (C) 2011 Elsevier Ltd. All rights reserved.