Usage of a speckle correlation for object surface topography

被引:2
作者
Horváth, P [1 ]
Smíd, P [1 ]
Wagnerová, P [1 ]
Hrabovsky, M [1 ]
机构
[1] Palacky Univ, Joint Lab Opt, Tr 17 Listopadu 50A, Olomouc 77200, Czech Republic
来源
ICO20: OPTICAL DESIGN AND FABRICATION | 2006年 / 6034卷
关键词
speckle pattern; correlation; non-contact measurement; topography;
D O I
10.1117/12.668177
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
The paper demonstrates possibility of application of the method called speckle pattern correlation for topography of the object surface under investigation. Scanning speckle pattern originating from different points of the object surface illuminated with laser beam enables to get information on height profile of the object surface in these points. This is presented on the measurement of the slope of the object surface. The principle of the presented method is shortly described including necessary equations. A possible optical set-up for the measurement of the slope of the object under investigation is designed and acquired results are presented in comparison with theoretic values.
引用
收藏
页数:6
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