Microstructure and erosion resistance performance of ZrAlN/Cu coating

被引：4

作者：

Du, Jun ^{[1
]}

Zhu, Xiaoying ^{[1
]}

Zhang, Ping ^{[1
]}

Cai, Zhihai ^{[1
]}

机构：

[1] Acad Armored Force Engn, Natl Key Lab Remfg, Beijing 100072, Peoples R China

来源：

18TH INTERNATIONAL VACUUM CONGRESS (IVC-18) | 2012年 / 32卷

关键词：

hardness; roughness; erosion resistance; magnetron sputtering; THIN-FILMS; MECHANICAL-PROPERTIES; TITANIUM-ALLOYS; NANOINDENTATION; TOUGHNESS; SYSTEM; CU;

D O I：

10.1016/j.phpro.2012.03.632

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

ZrAlN/Cu coating has been deposited onto Ti-6Al-4V substrate by reactive magnetron sputtering in order to improve its erosion resistance. The morphology and microstructure were studied combined with Field Emission Scanning Electron Microscrope(FSEM), X-ray Diffraction(XRD), X-ray Photoelectron Spectroscopy(XPS) and Transmission Electron Microscopy(TEM). Coatings hardness and toughness were measured by nano-indentation method and Vicker indentation method respectively. It has been found that Zr0.79Al0.19Cu0.02N coating possess dense columnar structure with 20 similar to 40nm columnar grains exbibiting (100) preferential orientation. XRD reflection peaks slightly shifts to higher angle, showing some of 19at% Al and 2at%Cu substitutely dissolves into face-centered cubic(FCC) ZrN lattice, XPS proves the existence of AlN and Cu phase in coating. Zr0.79Al0.19Cu0.02N coating demonstrates best erosion resistance at 15 degrees similar to 90 degrees impingement angle compared with Ti6Al4V substrate, ZrN and Zr0.80Al0.20N coating, attributing to combination of high hardness(40.7GPa) and good toughness. (C) 2012 Published by Elsevier B. V. Selection and/or peer review under responsibility of Chinese Vacuum Society (CVS).

引用

页码：757 / 765

页数：9

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