Design and Realization of 3D Printed AFM Probes

被引:29
|
作者
Alsharif, Nourin [1 ]
Burkatovsky, Anna [1 ]
Lissandrello, Charles [1 ]
Jones, Keith M. [2 ]
White, Alice E. [1 ,3 ,4 ]
Brown, Keith A. [1 ,3 ,4 ]
机构
[1] Boston Univ, Dept Mech Engn, 110 Cummington Mall, Boston, MA 02215 USA
[2] Oxford Instruments Asylum Res Inc, 6310 Hollister Ave, Santa Barbara, CA 93117 USA
[3] Phys Dept, 590 Commonwealth Ave, Boston, MA 02215 USA
[4] Div Mat Sci & Engn, 590 Commonwealth Ave, Boston, MA 02215 USA
关键词
additive manufacturing; atomic force microscopy; direct laser writing; two-photon polymerization; ATOMIC-FORCE MICROSCOPY; FABRICATION;
D O I
10.1002/smll.201800162
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Atomic force microscope (AFM) probes and AFM imaging by extension are the product of exceptionally refined silicon micromachining, but are also restricted by the limitations of these fabrication techniques. Here, the nanoscale additive manufacturing technique direct laser writing is explored as a method to print monolithic cantilevered probes for AFM. Not only are 3D printed probes found to function effectively for AFM, but they also confer several advantages, most notably the ability to image in intermittent contact mode with a bandwidth approximately ten times larger than analogous silicon probes. In addition, the arbitrary structural control afforded by 3D printing is found to enable programming the modal structure of the probe, a capability that can be useful in the context of resonantly amplifying nonlinear tip-sample interactions. Collectively, these results show that 3D printed probes complement those produced using conventional silicon micromachining and open the door to new imaging techniques.
引用
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页数:6
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