A Nanoscale Surface Structure Removal Process using Excimer Irradiation and a Cross-Shaped Electrode Tool

被引：1

作者：

Pa, P. S. ^{[1
]}

机构：

[1] Natl Taipei Univ Educ, Grad Sch Toy & Game Design, Dept Digital Content Design, Taipei 106, Taiwan

来源：

JOURNAL OF NANO RESEARCH | 2012年 / 18-19卷

关键词：

Cross-Shape Tool; Nano-Scale; Excimer irradiation; Touch-Panel; PET-Diaphragm; Micro-Electrochemical Etching;

D O I：

10.4028/www.scientific.net/JNanoR.18-19.1

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A newly designed cross-shaped electrode tool and the use of Excimer irradiation to assist in micro-electrochemical etching (mu-ECE) is presented. It is a precise surface treatment method for the nanoscale removal of defective Indium-tin-oxide (In2O3SnO2) conductive nanostructure from optical PET-diaphragms (PET) of digital paper touch-panels. In the current study, 1 72nm Excimer irradiation is used to boost the electrolytic action of the cross-shaped electrode tool. Scoring of the PET surface is eliminated and the workpiece (PET) feed rate can be higher with a consequent reduction in production costs. When Excimer irradiation is used the In2O3SnO2 thin-films are more easily broken up and the nano-particles escape from the PET substrate quickly and cleanly. The required machining time is shortened if Excimer irradiation is used before the electrochemical removal processing (mu-ECE) of the In2O3SnO2 layer.

引用

页码：1 / 7

页数：7

共 14 条

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