Optical surface profile measurement using phase retrieval by tuning the illumination wavelength

被引：12

作者：

Bao, Peng ^{[1
]}

Pedrini, Giancarlo ^{[1
]}

Osten, Wolfgang ^{[1
]}

机构：

[1] Univ Stuttgart, Inst Tech Opt, D-70569 Stuttgart, Germany

来源：

OPTICS COMMUNICATIONS | 2012年 / 285卷 / 24期

关键词：

Metrology; Surface measurements; Figure; Phase retrieval; Image reconstruction techniques; Holography; WAVE-FRONT RECONSTRUCTION;

D O I：

10.1016/j.optcom.2012.08.018

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

In this paper, we present a method for measuring the surface profile of an object by using diffraction intensity patterns recorded at different illumination wavelengths. The main advantages of this technique are: simple optical set-up, high immunity to noise and environmental disturbance, since no reference beam (like in holography) or additional moving parts are needed. Two iterative calculations are synchronously performed using two sequences of diffraction intensity patterns, producing fast convergence to the expected result. The effects of different parameters on the accuracy and efficiency of the method are investigated. Simulation and experimental results are presented. (C) 2012 Elsevier B.V. All rights reserved.

引用

页码：5029 / 5036

页数：8

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