Effects of elastic energy of thin films on bending of a cantilevered magnetostrictive film-substrate system

被引：2

作者：

Si, HM ^{[1
]}

Cho, CD ^{[1
]}

Kim, CB ^{[1
]}

机构：

[1] Inha Univ, Dept Mech Engn, Inchon 402751, South Korea

来源：

KSME INTERNATIONAL JOURNAL | 2004年 / 18卷 / 04期

关键词：

magnetostrictive film; magnetostriction; magnetostrictive coefficient; cantilever actuator;

D O I：

10.1007/BF02983646

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

In this paper, effects of elastic energy of magnetostrictive film on the deflection of a cantilevered film-substrate system are investigated. The total energy including the elastic energy of magnetostrictive film is formulated. And it is minimized to give the curvatures and the position of neutral axis of the cantilevered system. To discuss the effects of the elastic energy of film in a measured system, three magnetostrictive unimorph cantilevers and a bimorph cantilever reported elsewhere are reviewed. It is shown that the assumption, since the thickness of film is much smaller than that of substrate the film elastic energy is negligible, can cause considerable error in evaluating magnetostrictive coefficients. Not the ratio of thicknesses but elastic energies between film and substrate is also shown to play important role in making decision whether the assumption is valid or not.

引用

页码：622 / 629

页数：8

共 10 条

[1] Application of magnetostrictive thin films for microdevices [J].