Fabrication of a Bragg beam splitter for hard x-ray free-electron lasers

被引：3

作者：

Osaka, T. ^{[1
]}

Yabashi, M. ^{[2
]}

Sano, Y. ^{[1
]}

Tono, K. ^{[3
]}

Inubushi, Y. ^{[2
]}

Sato, T. ^{[2
]}

Matsuyama, S. ^{[1
]}

Ishikawa, T. ^{[2
]}

Yamauchi, K. ^{[1
]}

机构：

[1] Osaka Univ, Dept Precis Sci & Technol, Grad Sch Engn, 2-1 Yamada Oka, Suita, Osaka 5650871, Japan

[2] RIKEN, SPring 8 Ctr, Mikazuki, Hyogo 6795148, Japan

[3] Japan Synchrotron Rad Res Inst, Hyogo 6795198, Japan

来源：

11TH INTERNATIONAL CONFERENCE ON SYNCHROTRON RADIATION INSTRUMENTATION (SRI 2012) | 2013年 / 425卷

关键词：

D O I：

10.1088/1742-6596/425/5/052014

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We report a fabrication method of an ultrathin silicon crystal as a beam splitter for the hard x-ray regime based on the Bragg diffraction operated in the symmetric Bragg geometry, and evaluation results of crystalline perfection at SPring-8. A sub-10-mu m thick Si( 511) crystal was fabricated with a reactive dry etching method using atmospheric-pressure plasma. Following the evaluation of topography and diffractometry, the crystal was found to be strain-free, and capable of splitting a monochromatic x-ray beam into two branches with almost 1:1 splitting ratio.

引用

页数：4

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