Femtosecond nanostructuring of silicon surfaces

被引：19
作者：
Zabotnov, SV
Golovan', LA
Ostapenko, IA
Ryabchikov, YV
Chervyakov, AV
Timoshenko, VY
Kashkarov, PK
Yakovlev, VV
机构：
[1] Moscow MV Lomonosov State Univ, Fac Phys, Moscow 119992, Russia
[2] Univ Wisconsin, Dept Phys, Milwaukee, WI 53211 USA
来源：
JETP LETTERS | 2006年 / 83卷 / 02期
基金：
俄罗斯基础研究基金会;
关键词：
D O I：
10.1134/S0021364006020056
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
Nanostructures were formed upon the irradiation of single-crystal silicon surfaces with femtosecond laser pulses. These nanostructures were detected using scanning electron microscopy, Raman spectroscopy, and a photoluminescence technique.
引用
收藏
页码：69 / 71
页数：3
相关论文
共 18 条
  • [1] Formation of periodic surface structures by ultrashort laser pulses
    Agranat, MB
    Ashitkov, SI
    Fortov, VE
    Anisimov, SI
    Dykhne, AM
    Kondratenko, PS
    [J]. JOURNAL OF EXPERIMENTAL AND THEORETICAL PHYSICS, 1999, 88 (02) : 370 - 376
  • [2] Akhmanov S. A., 1985, Soviet Physics - Uspekhi, V28, P1084, DOI 10.1070/PU1985v028n12ABEH003986
  • [3] Modifying single-crystalline silicon by femtosecond laser pulses: an analysis by micro Raman spectroscopy, scanning laser microscopy and atomic force microscopy
    Bonse, J
    Brzezinka, KW
    Meixner, AJ
    [J]. APPLIED SURFACE SCIENCE, 2004, 221 (1-4) : 215 - 230
  • [4] Femtosecond laser ablation of silicon-modification thresholds and morphology
    Bonse, J
    Baudach, S
    Krüger, J
    Kautek, W
    Lenzner, M
    [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2002, 74 (01): : 19 - 25
  • [5] THE EFFECTS OF MICROCRYSTAL SIZE AND SHAPE ON THE ONE PHONON RAMAN-SPECTRA OF CRYSTALLINE SEMICONDUCTORS
    CAMPBELL, IH
    FAUCHET, PM
    [J]. SOLID STATE COMMUNICATIONS, 1986, 58 (10) : 739 - 741
  • [6] Sub-damage-threshold femtosecond laser ablation from crystalline Si: surface nanostructures and phase transformation
    Costache, F
    Kouteva-Arguirova, S
    Reif, J
    [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2004, 79 (4-6): : 1429 - 1432
  • [7] Femtosecond laser micromachining of grooves in silicon with 800 nm pulses
    Crawford, THR
    Borowiec, A
    Haugen, HK
    [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2005, 80 (08): : 1717 - 1724
  • [8] Kikoin I. K., 1976, TABLES PHYS DATA REF
  • [9] Kovalev D, 1999, PHYS STATUS SOLIDI B, V215, P871, DOI 10.1002/(SICI)1521-3951(199910)215:2<871::AID-PSSB871>3.0.CO
  • [10] 2-9
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