Influence of thermal heating on diamond-like carbon film properties prepared by filtered cathodic arc

被引：9

作者：

Khamnualthong, N. ^{[1
,2
]}

Siangchaew, K. ^{[2
]}

Limsuwan, P. ^{[1
,3
]}

机构：

[1] King Mongkuts Univ Technol Thonburi, Dept Phys, Fac Sci, Bangkok 10140, Thailand

[2] Western Digital Thailand Co Ltd, Ayutthaya 13160, Thailand

[3] Thailand Ctr Excellence Phys, Minist Educ, CHE, Bangkok 10400, Thailand

来源：

THIN SOLID FILMS | 2013年 / 544卷

关键词：

Diamond-like carbon; FCA; Heating effect; AMORPHOUS-CARBON; DLC FILMS; RAMAN-SPECTRA; OVERCOAT; DEPOSITION; SLIDER;

D O I：

10.1016/j.tsf.2013.02.074

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Tetrahedral amorphous diamond-like carbon (ta-DLC) films were deposited on magnetic recording heads using the filtered cathodic arc method. The deposited film thickness was on the order of several nanometers. The DLC films were then annealed to 100 degrees C-300 degrees C for 30 and 60 min, and the structure of the ta-DLC films was investigated using Raman spectroscopy, where the gross changes were observed in the Raman D and G peaks. Detailed interpretation concluded that there was sp(2) clustering as a function of temperature, and there was no sp(3)-to-sp(2) conversion after heating up to 300 degrees C. Furthermore, X-ray photoelectron spectroscopy suggested that oxidation of both the ta-DLC film and the adhesion layer occurs at 300 degrees C. Additionally, more film wear was observed with heating as measured by a nanoindenter. (C) 2013 Elsevier B. V. All rights reserved.

引用

页码：477 / 481

页数：5

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