DIELECTRIC RESPONSE OF VARIABLE THICKNESS Ba0.6Sr0.4TiO3 FILMS FOR PROPERTY-SPECIFIC DEVICE APPLICATIONS

被引：10

作者：

Weiss, C. V. ^{[2
,3
]}

Cole, M. W. ^{[1
]}

Alpay, S. P. ^{[2
,3
]}

Ngo, E. ^{[1
]}

Toonen, R. C. ^{[1
]}

Hirsch, S. G. ^{[1
]}

Demaree, J. D. ^{[1
]}

Hubbard, C. ^{[1
]}

机构：

[1] USA, Res Lab, Weapons & Mat Res Directorate, Mat Directorate,Act Mat Res Team, Aberdeen Proving Ground, MD 21005 USA

[2] Univ Connecticut, Mat Sci & Engn Program, Storrs, CT 06269 USA

[3] Univ Connecticut, Inst Mat Sci, Storrs, CT 06269 USA

来源：

INTEGRATED FERROELECTRICS | 2008年 / 100卷

关键词：

BST; dielectric constant; tunability; loss; leakage current; thickness;

D O I：

10.1080/10584580802540280

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The dielectric properties of barium strontium titanate thin films with composition Ba0.6Sr0.4TiO3 were studied as a function of film thickness for implementation in a variety of devices with different requirements. Films were prepared by metalorganic solution deposition and characterized using scanning electron microscopy, atomic force microscopy, and Rutherford back-scattering. The dielectric (100 kHz) and insulating properties were also measured. The film morphology and dielectric/insulating properties are thickness dependent, yet the best combination of properties was in films of 160 nm to 240 nm. These films had a moderate dielectric constant (300), low loss ( 0.029), good tunability ( 30%), and low leakage current ( 10- 8 A/cm2).

引用

页码：36 / 47

页数：12

共 28 条

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