Refractive index insensitive temperature sensor based on a photonic crystal nanobeam cavity

被引:0
作者
Li, Xuepei [1 ]
Wang, Chao [1 ]
Wang, Zheng [1 ]
Fu, Zhongyuan [1 ]
Sun, Fujun [1 ]
Tian, Huiping [1 ]
机构
[1] Beijing Univ Posts & Telecommun, Sch Informat & Commun Engn, State Key Lab Informat Photon & Opt Commun, Beijing 100876, Peoples R China
来源
17TH INTERNATIONAL CONFERENCE ON OPTICAL COMMUNICATIONS AND NETWORKS (ICOCN2018) | 2019年 / 11048卷
关键词
photonic crystal; nanobeam; 3D-FDTD; temperature sensing;
D O I
10.1117/12.2522602
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We present an ambient refractive index (RI) insensitive temperature sensor based on a Silicon-on-Insulator (SOI) ellipse stack major axis modulated photonic crystal (PC) nanobeam cavity (EPCNC). The PC nanobeam cavity is covered with SU-8 cladding to increase the temperature sensitivity by taking advantage of the relatively high thermooptic (TO) coefficient of SU-8 cladding. Three dimensional finite-difference time-domain (3D-FDTD) simulations are used for our analysis. The results show that the sensitivity of temperature sensing is-108.9pm/K. In particular, the proposed sensor not only achieves a competitive temperature sensitivity, but also eliminates the influence of ambient RI on sensing. Therefore, the proposed sensor is potentially a promising platform for future application of temperature sensing.
引用
收藏
页数:4
相关论文
共 9 条
[1]   Silicon photonic temperature sensor employing a ring resonator manufactured using a standard CMOS process [J].
Kim, Gun-Duk ;
Lee, Hak-Soon ;
Park, Chang-Hyun ;
Lee, Sang-Shin ;
Lim, Boo Tak ;
Bae, Hee Kyoung ;
Lee, Wan-Gyu .
OPTICS EXPRESS, 2010, 18 (21) :22215-22221
[2]  
Klimov N. N., 2015, Sens. Transducers, V191, P67
[3]   On-chip silicon waveguide Bragg grating photonic temperature sensor [J].
Klimov, Nikolai N. ;
Mittal, Sunil ;
Berger, Michaela ;
Ahmed, Zeeshan .
OPTICS LETTERS, 2015, 40 (17) :3934-3936
[4]   Demonstration of a compact temperature sensor based on first-order Bragg grating in a tapered fiber probe [J].
Kou, Jun-long ;
Qiu, Sun-jie ;
Xu, Fei ;
Lu, Yan-qing .
OPTICS EXPRESS, 2011, 19 (19) :18452-18457
[5]   Fiber Bragg Grating Sensors for Harsh Environments [J].
Mihailov, Stephen J. .
SENSORS, 2012, 12 (02) :1898-1918
[6]   Ultra-compact air-mode photonic crystal nanobeam cavity integrated with bandstop filter for refractive index sensing [J].
Sun, Fujun ;
Fu, Zhongyuan ;
Wang, Chunhong ;
Ding, Zhaoxiang ;
Wang, Chao ;
Tian, Huiping .
APPLIED OPTICS, 2017, 56 (15) :4363-4368
[7]   Optical Fiber Fabry-Perot Interferometer Based on an Air Cavity for Gas Pressure Sensing [J].
Xu, Ben ;
Liu, Yaming ;
Wang, Dongning ;
Jia, Dagong ;
Jiang, Chao .
IEEE PHOTONICS JOURNAL, 2017, 9 (02)
[8]   High-Q width modulated photonic crystal stack mode-gap cavity and its application to refractive index sensing [J].
Yao, Kaiyuan ;
Shi, Yaocheng .
OPTICS EXPRESS, 2012, 20 (24) :27039-27044
[9]   High sensitivity temperature sensor based on cascaded silicon photonic crystal nanobeam cavities [J].
Zhang, Yuguang ;
Liu, Penghao ;
Zhang, Senlin ;
Liu, Weixi ;
Chen, Jingye ;
Shi, Yaocheng .
OPTICS EXPRESS, 2016, 24 (20) :23037-23043